This course is an in-depth, hands-on exposure to the producing and tailoring of the materials used in nanofabrication. The course will cover chemical materials production techniques such as colloidal chemistry; atmosphere, low-pressure and plasma enhanced chemical vapor deposition; nebulization; and atomic layer deposition. It will also cover physical techniques such as sputtering; thermal and electron beam evaporation; and spin-on approaches. This course is designed to give students experience in producing a wide variety of materials tailored for their mechanical, electrical, optical, magnetic, and biological properties. This course is designed to be one of six capstone courses (Esc 211, 212, 213, 214, 215, 216) for the Penn State Semiconductor Manufacturing Technology (SMT) program. The course is lab intensive, leveraging the Nanofabrication Facility on the University Park campus. All lectures will be given in a technology classroom, Suite 114 Luber bldg., Research Park. This classroom is dedicated to the Center for Semiconductor Manufacturing Technology and thus has a wide variety of very specialized, "hands-on" materials and facilities continually available to students. The course grade evaluation will use mixture of tests, presentations, reports and project assignments. Teaming and team problem solving will be stressed.
Last Updated: 03/01/2016