This course overviews basic material properties as well as environment, health, and safety (EHS) issues in equipment operation and materials handling in "top down" and "bottom up" nanofabrication. The chemical and physical materials properties underlying nanotechnology are surveyed. EHS topics arising from the processing and disposal of these materials are addressed including: cleanroom operation, OSHA lab standard safety training, health issues, biosafety levels (BSL) guidelines, and environmental concerns. Specific safety issues dealing with nanofabrication equipment, materials, and processing will also be discussed including those pertinent to wet benches, thermal processing tools, vacuum systems and pumps, gas delivery systems and toxic substance handling and detection. This course is designed to be one of six capstone courses (ESC 211, 212, 213, 214, 215, 216) for the Penn State Semiconductor Manufacturing Technology (SMT) program. The course is lab intensive, leveraging the Nanofabrication Facility on the University Park campus. All lectures will be given in a technology classroom, Suite 114 Luber Bldg., Research Park. This classroom is dedicated to the Center for Semiconductor Manufacturing Technology and thus has a wide variety of very specialized, "hands-on" materials and facilities continually available to students. The course grade evaluation will use a mixture of tests, presentations, reports, and project assignments. Teaming and team problem solving will be stressed.
Last Updated: 03/01/2016