This course examines a variety of techniques and measurements essential for testing and for controlling material fabrication and final device performance. Characterization includes electrical, optical, physical, and chemical approaches. The characterization experience will include hands-on use of tools such as the Atomic Force Microscope (AFM), Scanning Electron Microscope (SEM), 1 nm resolution field emission SEM, fluorescence microscopes, and Fourier transform infrared spectroscopy. This course is designed to be one of six capstone courses (ESC 211, 212, 213, 214, 215, 216) for the Penn State Semiconductor Manufacturing Technology (SMT) program. The course is lab intensive, leveraging the Nanofabrication Facility on the University Park campus. All lectures will be given in a technology classroom, Suite 114 Lubert Bldg., Research Park. This classroom is dedicated to the Center for Semiconductor Manufacturing Technology and thus has a wide variety of very specialized, "hands-on" materials and facilities continually available to students. The course grade evaluation will use a mixture of tests, presentations, reports, and project assignments. Teaming and team problem solving will be stressed.
Last Updated: 03/01/2016